Title:
DRAWING APPARATUS AND DRAWING METHOD
Document Type and Number:
Japanese Patent JP2008242218
Kind Code:
A
Abstract:
To highly accurately detect a placing position and a placing attitude of a substrate on a drawing stage and to high-accuracy drawing patterns at predetermined positions, on both the surfaces of the substrate.
Contour parts 98a to 98d of one surface of the substrate F mounted on an exposure stage 18 are photographed by CCD cameras 22a to 22d, the placing position and placing posture of the substrate F are calculated, drawing data are corrected; and after exposing and recording a pattern on the basis of the corrected drawing data, the substrate F is inverted and drawing data are similarly exposed and recorded on the other surface.
Inventors:
KIKUCHI HIROAKI
MATAMA TORU
FUJII TAKESHI
SAWANO MITSURU
MATAMA TORU
FUJII TAKESHI
SAWANO MITSURU
Application Number:
JP2007084488A
Publication Date:
October 09, 2008
Filing Date:
March 28, 2007
Export Citation:
Assignee:
FUJIFILM CORP
International Classes:
G03F7/20
Domestic Patent References:
| JPH11307425A | 1999-11-05 | |||
| JPH11337314A | 1999-12-10 | |||
| JP2003282427A | 2003-10-03 | |||
| JP2004317204A | 2004-11-11 | |||
| JP2004343066A | 2004-12-02 | |||
| JP2004356411A | 2004-12-16 | |||
| JP2006259202A | 2006-09-28 | |||
| JP2006259715A | 2006-09-28 | |||
| JP2004356414A | 2004-12-16 | |||
| JP2002181513A | 2002-06-26 |
Attorney, Agent or Firm:
Takehiro Chiba
Toshiyuki Miyadera
Naoki Kashima
Yasuo Takubo
Toshiyuki Miyadera
Naoki Kashima
Yasuo Takubo