DRAWING METHOD

Japanese Patent JP2012134570

A

To provide a drawing method reducing the data volume of electron- and laser drawing data to shorten time for drawing data generation and drawing.

A drawing method for generating drawing data from design data for drawing on any given substrate includes: breaking a pattern figure of design data into units of plural drawing basic figures; defining an outer periphery of the basic figure as a closed figure expressed by line segments and apexes; defining a band-like contour part with an arbitrary band width along the line segments, with the line segment defined as reference, either of the outside and inside of the closed figure or on both sides thereof; defining the inside of the contour part as an inside part; expressing each figure definition on a single drawing data format to establish it as drawing data; and drawing the contour part with a small shot- or minute shot electron beam of a variable-shape electron beam having a small irradiation area and drawing the inside part with a large shot of a laser or variable-form electron beam having a large irradiation area.

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SATO ATSUSHI

JP2012089797A

July 12, 2012

April 11, 2012

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DAINIPPON PRINTING CO LTD

H01L21/027

JPH09298145A	1997-11-18
JPH10209000A	1998-08-07
JPS63208216A	1988-08-29
JPH02138723A	1990-05-28
JP2003195511A	2003-07-09
JPH01264221A	1989-10-20
JPH02210814A	1990-08-22

Satoshi Kanayama
Keiko Fukamachi
Hideo Ito
Hiromi Fujimasu
Naoki Goto
Yusuke Ito

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