Title:
Dress plate
Document Type and Number:
Japanese Patent JP6020973
Kind Code:
B2
Inventors:
Shoji Nakao
Kojiro Hiraiwa
Kojiro Hiraiwa
Application Number:
JP2015126955A
Publication Date:
November 02, 2016
Filing Date:
June 24, 2015
Export Citation:
Assignee:
Sumco inc.
International Classes:
B24B37/00; B24B37/08; B24B53/02; H01L21/304
Domestic Patent References:
| JP2013071212A | ||||
| JP2000218521A | ||||
| JP8243914A | ||||
| JP2145257A |
Foreign References:
| US6390909 |
Attorney, Agent or Firm:
Ichiro Abe