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Title:
DRESSER
Document Type and Number:
Japanese Patent JP2012130994
Kind Code:
A
Abstract:

To provide a dresser capable of shortening the start-up time of a polishing pad.

A protruding part is formed on the surface of a dresser 1 by causing the surface of a holding material 2 which holds diamond abrasive grains of the dresser 1 to swell like a dome. During a dressing treatment on a new polishing pad, a part of diamond abrasive grains 5 constituting a tip of the protruding part contacts to the surface of the pressing pad at a high contact pressure, to easily cut into the surface of the polishing pad. Consequently the time required for the dressing treatment, in other words, the start-up time of the polishing pad can be shortened.


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Inventors:
SENOO HIROYUKI
YOSHIDA KOICHI
OGATA KENJIRO
Application Number:
JP2010285800A
Publication Date:
July 12, 2012
Filing Date:
December 22, 2010
Export Citation:
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Assignee:
NITTA HAAS INC
International Classes:
B24B53/12; B24B37/00; H01L21/304
Domestic Patent References:
JP2002337050A2002-11-26
JP3072991U2000-11-07
JP2005161440A2005-06-23
Attorney, Agent or Firm:
Kazuhide Okada



 
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