DRIVE CONTROL SYSTEM FOR PIEZOELECTRIC BODY OF PROBE SCANNING TYPE MICROSCOPE

Japanese Patent JPH03272403

A

PURPOSE:To achieve a high speed and stability of control of a probe or a microbeam by applying a differential voltage varied in polarity to both electrodes of individual piezoelectric bodies for the control of a relative position between a sample surface and a probe or the sample surface and the microbeam to cancel a leakage of a piezoelectric body control signal. CONSTITUTION:For example, when a piezoelectric body 1 for a tripot type prove scanning is used, a positive V2 and a negative V2 the same in value opposite in polarity are applied differentially to counter electrodes of a Z-way piezoelectric body 3Z to cancel currents mutually as leaked to a probe 2 from both the electrodes so that a tunnel current is not affected. To generate such a voltage, a circuit as illustrated can be used and it applies differential voltages to electrodes countering each other as well with respect to an X-way piezoelectric body 3X and a Y-way piezoelectric body 3Y. Then, as for a piezoelectric body for a cylinder probe driving, uniform electrodes 16 are arranged on the internal surface of the cylindrical piezoelectric body 15 comprising a hollow PZT and an electrode 17 is provided on the outer surface thereof extending axially being divided in four.

UOZUMI KIYOHIKO

JP7287790A

December 04, 1991

March 22, 1990

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JEOL LTD

G01B7/34; G01N23/00; G01N37/00; G01Q10/04; G01Q10/06; G01Q60/10; H01J37/28; (IPC1-7): G01B7/34; G01N23/00; H01J37/28

Hiroshi Nirazawa (7 outside)

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