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Title:
DRIVE DEVICE FOR CONTACTLESS SENSORS AND CONTACTLESS SENSOR
Document Type and Number:
Japanese Patent JP2018077157
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a drive device for contactless sensors and a contactless sensor with which it is possible to heighten detection accuracy.SOLUTION: There is provided a drive device for contactless sensors equipped with a substrate (18) on which a plurality of voids (20) are formed, a flexible plane (24) for partitioning some voids, and a piezoelectric element (5) provided on the flexible plane in correspondence to the voids, wherein the drive device includes a signal generation circuit for generating a first drive signal (VDR) applied to a plurality of first piezoelectric elements and a second drive signal (VAD) applied to a second piezoelectric element different from the first piezoelectric element, the first drive signal causing a first vibration unit consisting of the first piezoelectric element for transmitting a sound wave toward a measurement object and a flexible plane corresponding thereto to vibrate, the second drive signal causing a second vibration part consisting of the second piezoelectric element and a flexible plane corresponding thereto to be placed into a deformed state at least in a vibration period of the first vibration unit.SELECTED DRAWING: Figure 9

Inventors:
FUKUDA TOSHIYA
Application Number:
JP2016219654A
Publication Date:
May 17, 2018
Filing Date:
November 10, 2016
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
G01S7/524; A61B8/14; G01S7/521
Attorney, Agent or Firm:
Teruho Tsukui



 
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