To provide a MEMS structure driving device and a driving method, capable of carrying out the motion of the MEMS (Micro Electro Mechanical System) structure by one electrode.
The MEMS structure driving device comprises a driving signal generating portion 20 generating and outputting a driving signal of the MEMS structure; a motion detecting portion 21 detecting the motion of the MEMS structure, and outputting a motion current signal corresponding to the motion; an amplifying portion 22 amplifying the motion current signal outputted from the motion detecting portion, and outputting that as a motion voltage signal; a gain adjusting portion 24 amplifying the driving signal from the driving signal generating portion, and outputting that as the driving signal; a differential circuit portion 25 adding/subtracting the signals inputted from the amplifying portion and the gain adjusting portion, and wherein the driving signal outputs a canceled motion signal; and a motion signal detecting portion 26 selecting and outputting the motion signal of predetermined frequency of the motion signals inputted from the differential circuit portion.
LEE BYEUNG-LEUL
LEE SANG-WOO
Tomoko Inazumi