Title:
液滴吐出装置
Document Type and Number:
Japanese Patent JP3621041
Kind Code:
B2
Abstract:
A droplet ejecting apparatus includes: a droplet quantity evaluation apparatus, wherein the mass of a droplet ejected onto an article is measured, and a measurement signal is generated based on the measurement result; a feedback control apparatus, wherein the measurement signal is compared with a respective reference value and then a control signal is generated based on the result of the comparison; and droplet ejecting apparatus for adjusting the amount of ejection for the droplet on the basis of the control signal. In the droplet apparatus, the amount of droplets ejected from the droplet ejecting apparatus can be accurately determined in real time, and the variation in the amount of ejected droplets, the presence thereof and the deviation of the arrival position thereof can also be determined.
Inventors:
Yukihisa Takeuchi
Koji Kimura
Kazuhiro Yamamoto
Koji Kimura
Kazuhiro Yamamoto
Application Number:
JP2000337977A
Publication Date:
February 16, 2005
Filing Date:
November 06, 2000
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
G01G3/16; B01F3/08; B01F5/20; B01L3/02; B05B12/08; B05B17/06; B05C5/02; B05C11/10; B41J2/125; G01B17/00; G01G17/04; G01N35/10; (IPC1-7): G01G3/16; B01F3/08; B01F5/20; B01L3/02; B05C5/02; B05C11/10; B41J2/125; G01B17/00; G01G17/04; G01N35/10
Domestic Patent References:
| JP11248927A | ||||
| JP2000180250A | ||||
| JP3428802B2 | ||||
| JP9290504A | ||||
| JP2846642B2 | ||||
| JP11262644A | ||||
| JP10160546A | ||||
| JP3388060B2 | ||||
| JP4339661A | ||||
| JP3492570B2 |
Foreign References:
| WO1999013300A1 |
Attorney, Agent or Firm:
Ippei Watanabe