Title:
ドライ真空ポンプ装置およびその運転方法
Document Type and Number:
Japanese Patent JP6553844
Kind Code:
B2
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Inventors:
Koichi Iwasaki
Application Number:
JP2014065256A
Publication Date:
July 31, 2019
Filing Date:
March 27, 2014
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04B49/06; F04B37/16; G05B11/32; H02P27/06
Domestic Patent References:
| JP10266991A | ||||
| JP2012054541A |
Attorney, Agent or Firm:
Shinjiro Ono
Toru Miyamae
Yukio Kanegae
Junichi Matsuo
Makoto Watanabe
Toru Miyamae
Yukio Kanegae
Junichi Matsuo
Makoto Watanabe