Title:
DRY VACUUM PUMP AND OPERATING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2003090287
Kind Code:
A
Abstract:
To provide a dry vacuum pump and a vacuum pump operating method, capable of shortening time for warming up, and improving un utilization rate.
This dry vacuum pump 103 driven by a motor 16 comprises a sensor 24 measuring the inner temperature of the dry vacuum pump 103, and a control portion 22 driving the motor 16 at a rotating speed faster than a rotating speed under normal operation to conduct warming up when a temperature measured by the sensor 24 is lower than a specified temperature.
Inventors:
FUKAI TOKIO
USUI KATSUAKI
YANAGISAWA SEIJI
USUI KATSUAKI
YANAGISAWA SEIJI
Application Number:
JP2001281959A
Publication Date:
March 28, 2003
Filing Date:
September 17, 2001
Export Citation:
Assignee:
EBARA CORP
International Classes:
F04C25/02; F04B37/16; F04B49/06; F04C28/06; F04C29/04; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): F04B49/06; F04B37/16; F04C25/02; F04C29/10; H01L21/205; H01L21/3065
Attorney, Agent or Firm:
Isamu Watanabe (3 outside)