To provide a simple structural drying apparatus which can dry the objective surface of a workpiece to remove water therefrom within a short time without fail and to provide a drying method.

The drying apparatus 10 is an apparatus which removes the water remaining on the objective surface 21 of the workpiece 20 after the surface 21 is treated with a chemical solution and is washed with water and is provided on the side of the objective surface 21 with an irradiation section 11 that irradiates the surface 21 with a short-pulse high-intensity radiation to evaporate the remaining water therefrom, a dry air supply section 13 that sends dry air 40 to the space between the section 11 and the surface 21, and a discharge section 15 that discharges the evaporated water from the space between the section 11 and the surface 21.