Title:
DRYING METHOD AND DRYING DEVICE
Document Type and Number:
Japanese Patent JP2014202456
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a drying method and a drying device capable of solving the problem in which streak unevenness is generated due to coating and becomes a cause of appearance inspection defect in a coating step for coating a coating liquid on a substrate by relatively moving a coating liquid supply part and the substrate.SOLUTION: In a coating step for coating a coating liquid on a substrate by relatively moving a coating liquid supply part and the substrate, and a drying step for forming a coating film by drying the coated film, streak unevenness generated in the coating step is alleviated and made less obvious by intentionally generating drying unevenness in the drying step, so that the occurrence of defective appearance is prevented.
Inventors:
TSUCHIDA SHUZO
HORIKAWA AKIHIRO
NAKAMURA YOSHIHIRO
HORIKAWA AKIHIRO
NAKAMURA YOSHIHIRO
Application Number:
JP2013080939A
Publication Date:
October 27, 2014
Filing Date:
April 09, 2013
Export Citation:
Assignee:
PANASONIC CORP
International Classes:
B05C9/14; F26B3/20; B05D3/02; F26B13/10
Domestic Patent References:
| JPH1076211A | 1998-03-24 | |||
| JP2013040689A | 2013-02-28 | |||
| JP2005093899A | 2005-04-07 | |||
| JP2008177300A | 2008-07-31 | |||
| JP2003001182A | 2003-01-07 | |||
| JP2005137971A | 2005-06-02 | |||
| JP2006289239A | 2006-10-26 | |||
| JP2006007029A | 2006-01-12 |
Attorney, Agent or Firm:
Yoshiaki Tokuda
Fujii Kentaro
Fujii Kentaro