Title:
DRYING METHOD AND DRYER FOR GLASS SUBSTRATE
Document Type and Number:
Japanese Patent JP2009198676
Kind Code:
A
Abstract:
To provide a method for drying-removing liquid droplets generated by a cleaning liquid used in cleaning a glass substrate and remaining on the glass substrate, in a small space.
A dryer 10 for the glass substrate holds vertically the glass substrate 1 by holding tools 2a, 2b. The holding tool 2a is arranged in an upper end part of the glass substrate, and the holding tool 2b is arranged in a lower end part thereof, to be used for both conveyance and holding. A drying means 12 is arranged in a peripheral part of the glass substrate, and is movable at least vertically or horizontally. The drying means 12 has a nozzle 3, and injects a gas flow containing isopropyl alcohol of a hydrophilic organic solvent.
Inventors:
SAWARA TERUTAKA
MASAKI HIROSHI
TSUMAKI NOBUO
MASAKI HIROSHI
TSUMAKI NOBUO
Application Number:
JP2008038730A
Publication Date:
September 03, 2009
Filing Date:
February 20, 2008
Export Citation:
Assignee:
HITACHI PLANT TECHNOLOGIES LTD
International Classes:
F26B5/14; F26B15/12; G03F1/68; G03F1/82; G09F9/00
Attorney, Agent or Firm:
Polaire Patent Business Corporation
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