Title:
乾燥処理装置
Document Type and Number:
Japanese Patent JP5335724
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce thermal energy required for a drying treatment step of a treating material than before.SOLUTION: A drying treatment device 100 includes a constant-temperature chamber 2 capable of storing a sealed container 5 for storing the treating material inside thereof and including each of connecting devices 12-14, a nitrogen gas substitution unit 15 changeable so that the inside of the sealed container 5 is pressurized by nitrogen gas, and a vacuuming unit 16 changeable so that the inside of the sealed container 5 is brought into a vacuum state, and moreover, it includes a cooling mechanism 3 for cooling the sealed container 5 conveyed to the outside from the constant-temperature chamber 2.
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Inventors:
Hideki Tanaka
Application Number:
JP2010073758A
Publication Date:
November 06, 2013
Filing Date:
March 26, 2010
Export Citation:
Assignee:
ESPEC CORPORATION
International Classes:
F26B5/04; F26B9/06; F26B21/14; H01M4/139
Domestic Patent References:
| JP11148774A | ||||
| JP63206294A | ||||
| JP2010025436A | ||||
| JP2003025549A | ||||
| JP2011169499A |
Foreign References:
| WO2005100891A1 |
Attorney, Agent or Firm:
Yoshiyuki Kaji
Makoto Suhara
Makoto Suhara