Title:
集塵装置および基板処理システム
Document Type and Number:
Japanese Patent JP6554045
Kind Code:
B2
Abstract:
In one embodiment, a dust collecting apparatus includes a container configured to contain a fluid that includes particles to be collected. The apparatus further includes one or more sound sources configured to generate, in the container, a standing sound wave including at least one node to trap the particles in a vicinity of the node. The one or more sound sources are configured to generate the standing sound wave so that the node does not contact a wall face of the container or contacts a predetermined portion of the wall face of the container. The predetermined portion is formed of a member that prevents the particles from leaving from the node located in a vicinity of the predetermined portion.
Inventors:
Tomohiko Sugita
Hiroyasu Iimori
Yoshihiro Ogawa
Hiroyasu Iimori
Yoshihiro Ogawa
Application Number:
JP2016034316A
Publication Date:
July 31, 2019
Filing Date:
February 25, 2016
Export Citation:
Assignee:
Toshiba Memory Corporation
International Classes:
B01D43/00; B01D49/00; B03B5/02; B03B13/00; B07B7/00; B07B11/04; H01L21/304
Domestic Patent References:
| JP2013533107A | ||||
| JP2005342598A | ||||
| JP200424959A | ||||
| JP11197491A | ||||
| JP2007229557A | ||||
| JP63503370A |
Foreign References:
| WO2012017976A1 | ||||
| US20150321129 | ||||
| US20120325747 | ||||
| US2215484 |
Attorney, Agent or Firm:
Hiroyuki Nagai
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Takeshi Sekine
Akaoka Akira
Jie Yamanoi
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Takeshi Sekine
Akaoka Akira
Jie Yamanoi