To provide a dust protective substrate capable of suppressing the deterioration of the display quality of an image, and to provide an electro-optic device using the same.
This dust protective substrate 11 is used, for example to prevent the adhesion of dust to the surface of a transmission type liquid crystal panel such as a liquid crystal projector, and comprises a piezoelectric substrate 12, a first transparent electrode 13, a second transparent electrode 14, and an antireflection coating 15. As the piezoelectric substrate 12, a quartz crystal is used for example. The first transparent electrode 13 and the second transparent electrode 14 are ITO for example, and are formed on the whole surfaces of the piezoelectric substrate 12 on the incidence side and on the exit side of the light 16. Further, an external power supply 29 is connected to the first transparent electrode 13 and the second transparent electrode 14. When the dust adheres to the surface of the dust protective substrate 11, it can be vibrated and removed from the surface of the dust protective substrate 11 by applying a voltage to the first transparent electrode 13 and the second transparent electrode 14 to vibrate the piezoelectric substrate 12.
COPYRIGHT: (C)2008,JPO&INPIT
Akihiro Shimizu
Kobayashi people
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