半導体装置の除塵用基板 - NITTO DENKO CORPORATION

Title:

半導体装置の除塵用基板

Document Type and Number:

Japanese Patent JP4307271

Kind Code:

B2

Inventors:

Hirofumi Fujii
Daisuke Usanda
Yoshio Terada
Funami Asami
Ryo Namikawa

Application Number:

JP2004004512A

Publication Date:

August 05, 2009

Filing Date:

January 09, 2004

Export Citation:

Assignee:

NITTO DENKO CORPORATION

International Classes:

C09D5/16; H01L21/304; C08G73/14; C09D179/08; C09D201/00; H01L21/02

Domestic Patent References:

Attorney, Agent or Firm:

Shohei Oguri
Hironori Honda
Toshimitsu Ichikawa

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