Title:
DUST SEAL
Document Type and Number:
Japanese Patent JPS62184277
Kind Code:
A
Abstract:
PURPOSE:To obtain a dust seal in which the trouble due o dust is not entirely caused by surrounding the movable parts to be protected from dust with a seal member via a clearance, and further vacuumizing the space surrounding by the seal member. CONSTITUTION:On the bearing housing 3 of a roller bearing 12, a seal member 7 is provided, and further a clearance 10 is provided between the seal member 7 and a shaft 1. And the movable parts of the bearing 12 are surrounded by the seal member 7, the bearing housing 3, and a cover 6, and further the space around the movable parts is vacuumized through a vacuum suction port 8 provided in the seal member 7. By this constitution, since the seal member 7 is of noncontacting type, dust is not produced from the seal member 7 itself, and all the dust produced from the roller bearing 12 is discharged through the vacuum suction port 8, and therefore the trouble due to dust is not entirely caused.
Inventors:
YABU SHUICHI
Application Number:
JP2406586A
Publication Date:
August 12, 1987
Filing Date:
February 07, 1986
Export Citation:
Assignee:
CANON KK
International Classes:
F16J15/40; B08B15/00; F16J15/44; G03F7/20; H01L21/027; H01L21/30; (IPC1-7): F16J15/40; F16J15/44; G03F7/20; H01L21/30
Attorney, Agent or Firm:
Tatsuo Ito