Title:
動的な焦点合わせ方法および装置
Document Type and Number:
Japanese Patent JP4981272
Kind Code:
B2
Inventors:
Corey Watkins
Mark harles
David Bourne
Pat Simpkins
Shiresh Kumar Goyal
Gerald Brown
Brian Delsey
Mark harles
David Bourne
Pat Simpkins
Shiresh Kumar Goyal
Gerald Brown
Brian Delsey
Application Number:
JP2005203715A
Publication Date:
July 18, 2012
Filing Date:
July 12, 2005
Export Citation:
Assignee:
August Technology Corporation
International Classes:
H01L21/66; G01B11/24; G02B7/28
Domestic Patent References:
| JP2000021955A | ||||
| JP2004165250A | ||||
| JP2004513459A | ||||
| JP10325705A | ||||
| JP587544A | ||||
| JP200375115A | ||||
| JP7140083A | ||||
| JP675164A |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita