Title:
EUV image formation device
Document Type and Number:
Japanese Patent JP6270998
Kind Code:
B2
Abstract:
An EUV imaging apparatus is provided, which includes a reference structure and a first optical element, which is actuatable relative to the reference structure with the aid of a first actuator. The first actuator is a self-holding actuator. The apparatus includes a second optical element, which is actuatable relative to the reference structure a second actuator. The second actuator is a non-self-holding actuator.
Inventors:
Jens Kugler
Stephan Hembacher
Michaela schmidt
Stephan Hembacher
Michaela schmidt
Application Number:
JP2016520364A
Publication Date:
January 31, 2018
Filing Date:
June 05, 2014
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
| JP2008047622A | ||||
| JP2012033924A | ||||
| JP2011077142A | ||||
| JP2006024919A | ||||
| JP2009536373A |
Foreign References:
| WO2013004278A1 | ||||
| US20120241268 | ||||
| US20110170078 | ||||
| US20130141707 | ||||
| US20040227107 |
Attorney, Agent or Firm:
Kenji Sugimura
Makoto Fukuo
Groundwork Kenichi
Makoto Fukuo
Groundwork Kenichi
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