Title:
EUVリソグラフィー用マスク基板及びその製造方法
Document Type and Number:
Japanese Patent JP4538254
Kind Code:
B2
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Inventors:
Takeo Hashimoto
Application Number:
JP2004090563A
Publication Date:
September 08, 2010
Filing Date:
March 25, 2004
Export Citation:
Assignee:
Renesas Electronics Corporation
International Classes:
H01L21/027; G03F1/22; G03F1/24; G03F1/54
Domestic Patent References:
| JP2001057328A | ||||
| JP2003515794A | ||||
| JP2004510343A |
Foreign References:
| WO2002027404A1 |
Attorney, Agent or Firm:
Shinji Hayami