Title:
EUVマスク検査装置及びEUVマスク検査方法
Document Type and Number:
Japanese Patent JP4822471
Kind Code:
B1
Inventors:
Takehisa research
Haruhiko Kususe
Haruhiko Kususe
Application Number:
JP2010266042A
Publication Date:
November 24, 2011
Filing Date:
November 30, 2010
Export Citation:
Assignee:
Lasertec Co., Ltd.
International Classes:
G03F1/22; G03F1/24; G03F1/84; H01L21/027
Domestic Patent References:
| JP2009251412A | 2009-10-29 | |||
| JP2009092407A | 2009-04-30 | |||
| JP2007171640A | 2007-07-05 | |||
| JP2003114200A | 2003-04-18 | |||
| JP2001116900A | 2001-04-27 |
Attorney, Agent or Firm:
Ken Ieiri
Kiyoshi Ogawa
Yasuhiro Iwase
Kiyoshi Ogawa
Yasuhiro Iwase