ＥＵＶ波長帯斜入射用反射光学素子

Title:

ＥＵＶ波長帯斜入射用反射光学素子

Document Type and Number:

Japanese Patent JP6489769

Kind Code:

B2

Abstract:

An optical element comprises a reflecting coating on a substrate. The reflecting coating contains boron and can have a thickness of more than 50 nm.

More Like This:

JP4685259	Photosensitive lithographic printing plate and plate making method for printing plate
JPH04242236	LIGHT BEAM EXPOSURE DEVICE
JPH07168365	CONTACT ALIGNER

Inventors:

Vittary crow clover

Application Number:

JP2014140047A

Publication Date:

March 27, 2019

Filing Date:

July 07, 2014

Export Citation:

Assignee:

Carl Zeiss SGM Gaehha

International Classes:

G03F7/20; G02B5/08; G02B19/00

Domestic Patent References:

Foreign References:

US20130170056

Attorney, Agent or Firm:

Kenji Sugimura
Groundwork Kenichi
Yamato Okano

Previous Patent: 情報処理装置、情報処理方法、プログラム

Next Patent: ELECTRONIC STILL CAMERA