Title:
ECR ION SOURCE
Document Type and Number:
Japanese Patent JP2022084397
Kind Code:
A
Abstract:
To provide an ECR ion source that can be miniaturized.SOLUTION: An ECR ion source (1) includes a vacuum chamber (20), an iron yoke (30) that covers the vacuum chamber from the outside and has a recess (35) formed such that the cross-sectional shape in the radial direction is substantially U-shaped, an electromagnet (40) that covers the vacuum chamber from the outside and is housed in the recess of the iron yoke, and an electromagnetic wave supply source (50) that supplies electromagnetic waves into the vacuum chamber, and tons are generated by accelerating the electrons (P) in the vacuum chamber with electromagnetic waves.SELECTED DRAWING: Figure 1
Inventors:
YODA TETSUHIKO
KANDA HIROKI
FUKUDA MITSUHIRO
KANDA HIROKI
FUKUDA MITSUHIRO
Application Number:
JP2020196253A
Publication Date:
June 07, 2022
Filing Date:
November 26, 2020
Export Citation:
Assignee:
UNIV OSAKA
International Classes:
H01J27/18; H01J37/08; H05H1/46
Attorney, Agent or Firm:
Makoto Ono
Kanayama Sage
Yoshiyuki Tsubokura
Kazuki Shigemori
Kenji Ando
Hidehiko Ichikawa
Yoshie Sakurada
Yosuke Kawasaki
Takuya Gomibuchi
Youichi Iino
Yusuke Ichikawa
Masahiro Moriyama
Takashi Kono
Yoshikazu Iwase
Yasufumi Shiroyama
Kanayama Sage
Yoshiyuki Tsubokura
Kazuki Shigemori
Kenji Ando
Hidehiko Ichikawa
Yoshie Sakurada
Yosuke Kawasaki
Takuya Gomibuchi
Youichi Iino
Yusuke Ichikawa
Masahiro Moriyama
Takashi Kono
Yoshikazu Iwase
Yasufumi Shiroyama