To provide an eddy current examination method capable of measuring a flaw in a device under test with high precision by eddy current examination and an eddy current examination device.
An eddy current examination method includes a synchronous process (S3, 4) and a magnetic field detection process (S5). In the synchronous process, the phase of an excitation voltage that coil drive means applies onto an exciting coil for generating an eddy current in a device under test and the phase of a drive voltage whose frequency is higher than the excitation voltage and that element driving means applies onto a magnetic impedance effect element for detecting a change in a magnetic field generated in the exciting coil are made to be synchronized. In the magnetic field detection process, a change in a magnetic field generated in the exciting coil caused by an eddy current generated in the device under test is detected by the magnetic impedance effect element.
HATANAKA HIROAKI
KAWAI HIROKI
| JP2001183347A | 2001-07-06 | |||
| JP2006343300A | 2006-12-21 | |||
| JP2011013087A | 2011-01-20 | |||
| JP2009527745A | 2009-07-30 | |||
| JP2000111626A | 2000-04-21 |
Echizen Masahiro