Title:
Edge detector
Document Type and Number:
Japanese Patent JP6283971
Kind Code:
B2
Inventors:
Takeo Sakuma
Teruhiko Nishikawa
Teruhiko Nishikawa
Application Number:
JP2016253763A
Publication Date:
February 28, 2018
Filing Date:
December 27, 2016
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
H01L21/301; B23K26/00; B23K26/364
Domestic Patent References:
| JP2012253299A | ||||
| JP2009021375A | ||||
| JP6034345A | ||||
| JP11101750A |
Attorney, Agent or Firm:
Kenzo Matsuura
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