PURPOSE: To improve a stress resisting migration characteristic by forming aluminium electrodes having a migration preventing function on an interface between a dielectric and a piezo-electric thin film by aluminium films orientated in a fixed direction like a crystal bearing.
CONSTITUTION: An elastic surface wave filter 1 using a ZnO/R face sapphire substrate is formed by forming the piezo-electric thin film 4 of (1120) orientation ZnO on the surface of a monocrystalline dielectric 2 consisting of R-face sapphire and forming blind-like aluminium electrodes 3 on the interface between the dielectric 2 and the thin film 4. Namely, the aluminum electrodes 3 having the migration preventing function are formed on the interface between the dielectric 2 and the thin film 4. Consequently, the stress resisting migration characteristic can be improved.
| JPS5678222 | ELASTIC SURFACE WAVE COMB LINE FILTER |
| JPS53139953 | ELASTIC SURFACE WAVE FILTER |
SAKURAI ATSUSHI
KIMURA KOJI
| JPS5549014A | 1980-04-08 | |||
| JPS6298812A | 1987-05-08 |