Title:
弾性波装置及びその製造方法
Document Type and Number:
Japanese Patent JP5850137
Kind Code:
B2
Abstract:
An elastic wave device is provided that not only offers an increased acoustic velocity but also is insusceptible to the spurious responses of other wave modes and a method for producing such an elastic wave device. An elastic wave device has a lithium niobate film (5) and uses an SH surface acoustic wave. The elastic wave device (1) has a supporting substrate (2), a high-acoustic-velocity film (3) formed on the supporting substrate (2) and configured so that the acoustic velocity of the propagating bulk wave is higher than the acoustic velocity of the elastic wave that propagates on the lithium niobate film (5), a low-acoustic-velocity film (4) stacked on the high-acoustic-velocity film (3) and configured so that the acoustic velocity of the propagating bulk wave is lower than the acoustic velocity of the bulk wave that propagates in the lithium niobate film (5), the lithium niobate film (5) stacked on the low-acoustic-velocity film (4), and an IDT electrode (6) formed on either side of the lithium niobate film (5). When the lithium niobate film (5) has Euler angles of (0°±5°, ¸, 0°), ¸ is in the range of 0° to 8° and 57° to 180°.
Inventors:
Hajime Kondo
Application Number:
JP2014506204A
Publication Date:
February 03, 2016
Filing Date:
March 15, 2013
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
H03H9/25; H03H3/08; H03H9/145
Domestic Patent References:
| JP2005210294A | ||||
| JP2006093971A | ||||
| JP2011120062A | ||||
| JP11191721A | ||||
| JP2004343359A | ||||
| JP2010045752A |
Foreign References:
| WO2011037145A1 |
Attorney, Agent or Firm:
Patent business corporation Miya saki, table of contents patent office