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Title:
ELASTIC WAVE DEVICE AND MANUFACTURING METHOD OF THE SAME
Document Type and Number:
Japanese Patent JP2012160979
Kind Code:
A
Abstract:

To stabilize filter characteristics and improve the reliability in an elastic wave device.

An elastic wave device includes a piezoelectric substrate 10, a comb-shaped electrode 12 formed on the piezoelectric substrate 10, and an insulative film 16 formed on a surface of the comb-shaped electrode 12 by using Atomic Layer Deposition (ALD) method and including aluminum oxide. A manufacturing method of the elastic wave device includes a process where the comb-shaped electrode 12 is formed on the piezoelectric substrate 10 and a process where the insulative film 16 including aluminum oxide is formed on the surface of the comb-shaped electrode 12 by using ALD method. The insulative film 16 is formed by ALD method, thereby stabilizing filter characteristics and improving the reliability.


Inventors:
TSUDA KEIJI
Application Number:
JP2011020248A
Publication Date:
August 23, 2012
Filing Date:
February 01, 2011
Export Citation:
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Assignee:
TAIYO YUDEN KK
International Classes:
H03H9/145; H01L41/09; H01L41/18; H01L41/22; H01L41/23; H03H3/08; H03H9/64
Domestic Patent References:
JP2006165537A2006-06-22
JP2007312201A2007-11-29
JP2009188844A2009-08-20
JP2007336417A2007-12-27
JP2002135075A2002-05-10
Attorney, Agent or Firm:
Shuhei Katayama