Title:
弾性波デバイス、フィルタおよびマルチプレクサ
Document Type and Number:
Japanese Patent JP6681380
Kind Code:
B2
Abstract:
To achieve suppression of breakage to IDT by high power.SOLUTION: The elastic wave device includes: a piezoelectric substrate 10; a metal film having a first region 12b which is formed on the piezoelectric substrate 10, uses a metal with a fusion point equal to or higher than that of Pt as its major component and has columnar crystal grains 50 and having a second region 12a which is formed in the lamination direction of the first region 12b and has lower crystalline than that of the first region 12b or is amorphous; and a pair of interdigital electrodes exciting an elastic surface wave.SELECTED DRAWING: Figure 4
More Like This:
| JPS6265509 | SURFACE WAVE DEVICE |
| WO/2023/074373 | ELASTIC WAVE RESONATOR, ELASTIC WAVE FILTER DEVICE, AND MULTIPLEXER |
Inventors:
Shinpei Miura
Iwaki Takashi
Iwaki Takashi
Application Number:
JP2017254660A
Publication Date:
April 15, 2020
Filing Date:
December 28, 2017
Export Citation:
Assignee:
TAIYO YUDEN CO.,LTD.
International Classes:
H03H9/145
Domestic Patent References:
| JP2016136712A | ||||
| JP5226337A | ||||
| JP2005253034A | ||||
| JP2004241785A | ||||
| JP2002368568A | ||||
| JP7111436A |
Foreign References:
| WO2016080444A1 |
Attorney, Agent or Firm:
Shuhei Katayama