Title:
弾性波共振器、フィルタ並びにマルチプレクサ
Document Type and Number:
Japanese Patent JP7098453
Kind Code:
B2
Abstract:
To improve the characteristics of an acoustic wave resonator.SOLUTION: An acoustic wave resonator includes a substrate, a lower electrode provided on the substrate, a first piezoelectric layer provided on the lower electrode and made of a single crystal material, and a second piezoelectric layer provided on the first piezoelectric layer and made of a single crystal material, an upper electrode provided on the piezoelectric layer so as to form a resonance region facing the lower electrode with at least a portion of the piezoelectric layer interposed therebetween, and an insertion film provided on at least a part of the resonance region between the first piezoelectric layer and the second piezoelectric layer.SELECTED DRAWING: Figure 1
Inventors:
Hiroomi Kaneko
Application Number:
JP2018134166A
Publication Date:
July 11, 2022
Filing Date:
July 17, 2018
Export Citation:
Assignee:
TAIYO YUDEN CO.,LTD.
International Classes:
H03H9/17; H03H9/54; H03H9/70
Domestic Patent References:
| JP2015139167A | ||||
| JP7254836A | ||||
| JP2007159123A | ||||
| JP2013034130A |
Attorney, Agent or Firm:
Shuhei Katayama