Title:
ELECTRIC CONDUCTIVE TRANSPARENT FILM AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JP3834339
Kind Code:
B2
Abstract:
PURPOSE: To obtain an electric conductive transparent film more excellent in etchability than an ITO film, having electric conductivity comparable to that of the ITO film and also more excellent in moisture resistance than the ITO film.
CONSTITUTION: This electric conductive transparent film is made of amorphous oxide of indium and zinc and the atomic ratio between In and Zn satisfies In/(In+Zn)=0.55 to 0.75, or this film is made of amorphous oxide of indium, zinc and at least one kind of 3rd element selected among Sn, Al, Sb, Ga and Ge and the atomic ratio between In and Zn satisfies In/(In+Zn)=0.55 to 0.75. The percentage of the 3rd element is ≤20 atomic % of the total amt. of the 3rd element, In and Zn.
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Inventors:
Akatsuki at sea
Masatsugu Oyama
Masatoshi Shibata
Masatsugu Oyama
Masatoshi Shibata
Application Number:
JP19048093A
Publication Date:
October 18, 2006
Filing Date:
July 30, 1993
Export Citation:
Assignee:
IDEMITSU KOSAN CO.,LTD.
International Classes:
C01G15/00; C23C14/08; C23C18/12; G02F1/1343; H01B5/14; H01B13/00; (IPC1-7): C01G15/00; C23C14/08; C23C18/12; G02F1/1343; H01B5/14; H01B13/00
Domestic Patent References:
| JP6290641A |
Attorney, Agent or Firm:
Shizuo Nakamura