Title:
ELECTRIC FIELD EMISSION ELECTRON SOURCE AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2016207319
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an electric field emission electron source in which a hexaboride single crystal having stable electron emission characteristics is used and electron emission performance is improved with a more simple structure.SOLUTION: An electric field emission electron source is configured such that a tip work piece 15 is cut out along a predetermined crystal axis from a single crystal growth body 13 of hexaboride grown in a melt (liquid phase), and a needle part 17 at the tip thereof in the longitudinal direction, the needle part being formed integrally with a support section 18, is sharpened and cleaned to form a crystal face terrace (facet) at the tip, the crystal face terrace being vertical to the crystal axis.SELECTED DRAWING: Figure 2
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Inventors:
KUSUNOKI TOSHIAKI
NAKAYAMA TAKESHI
YAMAMOTO HIROYUKI
HASHIZUME TOMIHIRO
YAMAMOTO KENICHI
SAKAI YUSUKE
MURAKOSHI HISAYA
OSE YOICHI
NAKAYAMA TAKESHI
YAMAMOTO HIROYUKI
HASHIZUME TOMIHIRO
YAMAMOTO KENICHI
SAKAI YUSUKE
MURAKOSHI HISAYA
OSE YOICHI
Application Number:
JP2015084643A
Publication Date:
December 08, 2016
Filing Date:
April 17, 2015
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J1/304; C30B29/10; C30B33/00; H01J1/30; H01J9/02; H01J37/073
Attorney, Agent or Firm:
Yusuke Hiraki
Sekiya Mitsuo
Toshiaki Watanabe
Sekiya Mitsuo
Toshiaki Watanabe