Title:
ELECTRICALLY CHARGED PARTICLE BEAM LENS ARRAY AND ELECTRICALLY CHARGED PARTICLE BEAM EXPOSURE DEVICE USING THE SAME
Document Type and Number:
Japanese Patent JP2006049703
Kind Code:
A
Abstract:
To provide an electronic lens array with less crosstalk and high voltage applicable thereto, and to provide a manufacturing method of the array.
In the electrically charged particle beam lens array, an upper electrode 521, intermediate electrodes 522 and a lower electrode 523 are sequentially arranged with a plurality of openings. Shield electrodes 524 and 525 having a plurality of openings are disposed between the upper electrode 521 and the lower electrode 523. The shield electrodes electrically float and a voltage applying means 515 is connected to the intermediate electrodes 522.
Inventors:
HIROSE FUTOSHI
ONO HARUTO
OSANAGA KENICHI
SOMETA YASUHIRO
MURAKI MASATO
OTA HIROYA
ONO HARUTO
OSANAGA KENICHI
SOMETA YASUHIRO
MURAKI MASATO
OTA HIROYA
Application Number:
JP2004230958A
Publication Date:
February 16, 2006
Filing Date:
August 06, 2004
Export Citation:
Assignee:
CANON KK
HITACHI HIGH TECH CORP
HITACHI HIGH TECH CORP
International Classes:
H01L21/027; G03F7/20; H01J37/12; H01J37/305
Attorney, Agent or Firm:
Tetsuya Ito
Kazunori Saito
Kazunori Saito