To efficiently obtain reformed water contg. decreased metallic impurities by effecting blectrolysis while supplying a nomnetallic salt soln. and oxygen- contg. gas to the anode chamber and cathode chamber of an electrolytic cell mounted with an anion exchange membrane.
Since the ion exchange membrane 2 is mounted at the electrolytic cell 1, the degradation in efficiency by mixing of anolyte and catholyte is averted. Then, the reformed water is obtd. with high efficiency if the electrolysis is effected while the soln. contg. the nonmetallic salt, for example, ammonium chloride is supplied to the anode chamber of such electrolytic cell 1 and the oxygen-contg. gas is supplied to the cathode chamber. Namely, the acidic water which contains gaseous oxygen (ozone) and hypochlorous acid ions, etc., and does not contain other impurities is obtd. in the cathode chamber. The acidic water has oxidation reduction potential of ≥1000mN and satisfies pH$3 and is adequate for washing of electronic parts. The alkaline water contg. hydrogen peroxide is formed in the cathode chamber. Since the impurities do not exist in this water either, the acidic water is usable for washing water.
TANAKA MASASHI
NAKAJIMA YASUO
NISHIKI YOSHINORI
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