Title:
スインギング対物減速浸漬レンズの電子光学的集束、偏向、信号収集システムと方法
Document Type and Number:
Japanese Patent JP2005521215
Kind Code:
A
Abstract:
This invention relates to rotation speed dip object cylinder method, wherein, the lens comprises magnetic lens near generate magnetic field near sample to focus particle beam onto sample; the sample provides potential electrode for speed particle beam to reduce particle beam energy; multiple bias rotation system to make the sample scan for large range; the bias units are put to deceleration field with remaining one into magnetic lens chamber with property hole radium detection unit.
Inventors:
Chen, Zhong-way
Application Number:
JP2003578966A
Publication Date:
July 14, 2005
Filing Date:
March 21, 2002
Export Citation:
Assignee:
Hermes-Microvision (Taiwan) Incorporated
International Classes:
H01J37/141; G01N23/00; G21G5/00; H01J3/14; H01J3/26; H01J37/147; H01J37/244; H01J37/28; H01J47/00; (IPC1-7): H01J37/141; H01J37/147; H01J37/244; H01J37/28
Domestic Patent References:
| JPH1064464A | 1998-03-06 | |||
| JP2001283759A | 2001-10-12 | |||
| JPH1151886A | 1999-02-26 | |||
| JP2001513258A | 2001-08-28 | |||
| JPS57202630A | 1982-12-11 | |||
| JPH02281612A | 1990-11-19 | |||
| JP2001273861A | 2001-10-05 |
Foreign References:
| WO2001056056A2 | 2001-08-02 |
Other References:
日本学術振興会第１３２委員会, 電子・イオンビームハンドブック, vol. 第２版, JPN4007001843, 25 September 1986 (1986-09-25), JP, pages ９５頁, ISSN: 0000814827
日本学術振興会第１３２委員会, 電子・イオンビームハンドブック, vol. 第２版, JPNX007050425, 25 September 1986 (1986-09-25), JP, pages ９５頁, ISSN: 0000894214
日本学術振興会第１３２委員会, 電子・イオンビームハンドブック, vol. 第２版, JPNX007050425, 25 September 1986 (1986-09-25), JP, pages ９５頁, ISSN: 0000894214
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa