Title:
電気－機械変換素子、液体吐出ヘッド、液体吐出ユニット及び液体を吐出する装置
Document Type and Number:
Japanese Patent JP7423967
Kind Code:
B2
Abstract:
To provide an electro-mechanical conversion element capable of obtaining an electro-mechanical conversion film having good crystal orientation and obtaining high displacement characteristics.SOLUTION: In an electro-mechanical conversion element in which an electro-mechanical conversion film and an internal electrode film are alternately laminated on a lower electrode, and an upper electrode is formed on the electro-mechanical conversion film formed at the uppermost portion, the internal electrode film is not formed between the lower electrode and the electro-mechanical conversion film closest to the lower electrode, and the electro-mechanical conversion film closest to the lower electrode has (100) orientation rate of 95% or more.SELECTED DRAWING: Figure 1
Inventors:
Satoshi Mizukami
Application Number:
JP2019182759A
Publication Date:
January 30, 2024
Filing Date:
October 03, 2019
Export Citation:
Assignee:
株式会社リコー
International Classes:
H10N30/079; B41J2/01; B41J2/14; H10N30/067; H10N30/078; H10N30/20; H10N30/50; H10N30/853; H10N30/87
Domestic Patent References:
| JP2000349357A | ||||
| JP2017112281A | ||||
| JP2008047676A | ||||
| JP2014082464A | ||||
| JP8258260A | ||||
| JP2019033242A |
Attorney, Agent or Firm:
Chieko Tateno