PURPOSE: To produce an inexpensive and highly efficient electrode material free from toxicity by producing a spinel oxide having a specific composition composed essentially of Cu and Mn.
CONSTITUTION: Pure Mn and Cu are disposed as targets 2, 2a, respectively, in a chamber 1 in a sputtering device and binary simultaneous reactive sputtering treatment of Cu and Mn is carried out by the well-known method in a gas composed essentially of oxygen, by which a film of a multiple compound consisting of a spinel oxide represented by CuxMn3-xO4 [where (x) is 0.5 to 2.0] is formed on a substrate. At this time, electric conductivity and composition can be controlled by regulating substrate temp. and applied electric power. By this method, the electrode material suitable for cathode for lithium battery, etc., can be obtained.
SAKAMOTO RYUICHI
KANAMARU BUNICHI
YOSHIKAWA SHINICHI
| JPH02267861A | 1990-11-01 |