Title:
プラズマ処理装置用電極板
Document Type and Number:
Japanese Patent JP6485270
Kind Code:
B2
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Inventors:
Koji Higashi
Application Number:
JP2015148446A
Publication Date:
March 20, 2019
Filing Date:
July 28, 2015
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
H01L21/3065
Domestic Patent References:
| JP6251223A | ||||
| JP6254442A | ||||
| JP62199019A | ||||
| JP1149964A | ||||
| JP7161694A | ||||
| JP835067A | ||||
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| JP11279778A | ||||
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| JP2011526966A |
Attorney, Agent or Firm:
Masakazu Aoyama