Title:
電極構造および半導体発光装置
Document Type and Number:
Japanese Patent JP7345261
Kind Code:
B2
Abstract:
An electrode structure includes: an indium tin oxide (ITO) electrode that includes ITO; an Al electrode that includes Al and covers the ITO electrode; and a barrier electrode that includes at least one of TiN and Cr and is interposed in a region between the ITO electrode and the Al electrode.
Inventors:
Ryosuke Ishimaru
Youhei Ito
Yasuo Nakanishi
Youhei Ito
Yasuo Nakanishi
Application Number:
JP2019033071A
Publication Date:
September 15, 2023
Filing Date:
February 26, 2019
Export Citation:
Assignee:
ROHM Co., Ltd.
International Classes:
H01L33/40; C23C28/00; H01L21/28; H01L33/10; H01L33/32
Domestic Patent References:
| JP2009094089A | ||||
| JP2006261609A | ||||
| JP5179461A | ||||
| JP2011061032A | ||||
| JP2018137469A | ||||
| JP2005333118A | ||||
| JP2008112957A | ||||
| JP2014053458A | ||||
| JP2014150245A | ||||
| JP2014044971A | ||||
| JP1307280A |
Attorney, Agent or Firm:
Patent Attorney Corporation Ai Patent Office