To provide an electrode substrate having an insulating film which prevents lowering of insulating pressure resistance, does not peel due to repeated collision, and has excellent drive durability; an electrostatic actuator having the electrode substrate, and a manufacturing method thereof.
The manufacturing method comprises a step generating electrostatic force in a space with a vibrating plate 22 which is a moving electrode opposite at a predetermined interval, and forming an individual electrode 12 which is a fixed electrode for displacing the vibrating plate 22 on the electrode substrate 10; and a step alternately repeating deposition processing forming an electrode side insulating film 15 covering at least the individual electrode 12 and surface modification processing washing and surface-modifying of the insulating film, until the electrode side insulating film 15 with required thickness is formed.
COPYRIGHT: (C)2008,JPO&INPIT
FUJISAWA SATOSHI
Kiyoshi Yasushima
Souji Sasaki
Noboru Omura
Takanashi Norio
Motoki Shandong
Next Patent: MACHINING TOOL INSPECTING DEVICE