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Title:
ELECTRODE SYSTEM FOR ELECTRIC DISCHARGE TREATMENT. AND PLASMA DISCHARGE TREATMENT APPARATUS AND DISCHARGE TREATMENT METHOD USING THIS SYSTEM
Document Type and Number:
Japanese Patent JP2004027344
Kind Code:
A
Abstract:

To stably form plasma while reducing the usage of rare gas such as gaseous helium, and other gases permitting a glow discharge under the atmospheric pressure.

The electrode system for the plasma discharge treatment which has a flow passage to introduce the discharge gas and the film-forming gas and a flow passage for discharging the gas after the treatment is characterized in that at least one electrode is formed of an electrode group consisting of a plurality of paralleled electrodes, and that at least one in the electrode group is arranged in a position nearer the base material to be treated than the other electrodes forming the electrode group.


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Inventors:
OZAKI KOJI
FUKAZAWA KOJI
MAEDA KIKUO
Application Number:
JP2002189749A
Publication Date:
January 29, 2004
Filing Date:
June 28, 2002
Export Citation:
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Assignee:
KONICA MINOLTA HOLDINGS INC
International Classes:
C08J7/00; B01J19/08; C23C16/507; (IPC1-7): C23C16/507; B01J19/08; C08J7/00



 
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