Title:
電磁界供給装置およびプラズマ処理装置
Document Type and Number:
Japanese Patent JP4499323
Kind Code:
B2
Inventors:
Nobuo Ishii
Shinohara
Shinohara
Application Number:
JP2001297801A
Publication Date:
July 07, 2010
Filing Date:
September 27, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
日本高周波株式会社
日本高周波株式会社
International Classes:
H01P5/12; H05H1/46; B01J19/08; H01L21/205; H01L21/302; H01L21/3065; H01P1/17; H01P3/127; H01P5/02; H01Q13/22
Domestic Patent References:
| JP2000299198A | ||||
| JP5255858A | ||||
| JP6005386A | ||||
| JP11111696A | ||||
| JP9213685A | ||||
| JP9063793A | ||||
| JP2001073150A | ||||
| JP6333848A | ||||
| JP6044099U |
Attorney, Agent or Firm:
Masaki Yamakawa