Title:
電気機械変換装置及びその作製方法
Document Type and Number:
Japanese Patent JP5875244
Kind Code:
B2
Abstract:
An electromechanical transducer includes a first electrode (13); a silicon oxide film disposed on the first electrode (13); and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode (4) disposed on the silicon nitride film so as to oppose the first electrode (13).
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Inventors:
Kazutoshi Torashima
Takahiro Akiyama
Toshio Tomiyoshi
Takahiro Akiyama
Toshio Tomiyoshi
Application Number:
JP2011084675A
Publication Date:
March 02, 2016
Filing Date:
April 06, 2011
Export Citation:
Assignee:
Canon Inc
International Classes:
H04R19/00; H04R31/00
Domestic Patent References:
| JP2007259165A | ||||
| JP2008288813A | ||||
| JP2007527285A | ||||
| JP2006352808A | ||||
| JP2002518913A |
Foreign References:
| US20080283945 | ||||
| WO2010100861A1 | ||||
| US20050200241 | ||||
| US20060284519 | ||||
| US6622368 |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa