Title:
電気機械変換器およびその製造方法
Document Type and Number:
Japanese Patent JP7194080
Kind Code:
B2
Abstract:
To provide an electromechanical transducer having a lightweight movable member and a large amount of charge in a charged portion, and a manufacturing method thereof.SOLUTION: An electromechanical transducer (1) that converts between electric power and moving power by utilizing the electrostatic interaction between a charged portion and a counter electrode includes a fixed substrate (13), movable members (12,12A, 12A', 12B, 12', 12'') that can move relative to the fixed substrate while maintaining a certain distance from the fixed substrate, and has grooves (124A, 124B) on the surface facing the fixed substrate, and in which the groove and base parts (123A, 123B) other than the groove are alternately arranged in the moving direction, a charged portion (14) that is arranged on the base portion on the facing surface, has a width larger than that of the base portion in the moving direction, and has an end portion (14E) protruding above the groove in the moving direction, and counter electrodes (15, 16) arranged on the surface of the fixed substrate facing the movable member.SELECTED DRAWING: Figure 2
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Inventors:
Tomoe Ikeda
Application Number:
JP2019108709A
Publication Date:
December 21, 2022
Filing Date:
June 11, 2019
Export Citation:
Assignee:
CITIZEN WATCH CO.,LTD.
International Classes:
H02N1/00
Domestic Patent References:
| JP2009232667A | ||||
| JP2018098835A |
Foreign References:
| WO2018174077A1 | ||||
| WO2018062195A1 |
Attorney, Agent or Firm:
Aoki Atsushi
Shinji Mihashi
Tomohiro Nanzan
Go Miura
Ryoichi Hagiwara
Shinji Mihashi
Tomohiro Nanzan
Go Miura
Ryoichi Hagiwara