Title:
電気機械変換器
Document Type and Number:
Japanese Patent JP6678526
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To increase the potential difference between a base portion and a charging layer of an electret substrate and also to increase output of an electromechanical transducer which utilizes the electret substrate.SOLUTION: Disclosed is an electret substrate (50) which is composed of a charging part of an electromechanical transducer in which transformation between electric power and mechanical power is performed by utilizing electrostatic interaction between the charging part and a counter electrode. This electret substrate includes: a base (51) composed of Si; a first SiOlayer (52) formed on the base; an Si layer (53) formed on the first SiOlayer; and a second SiOlayer (54) which is formed on the Si layer and contains a positive ion (K+).SELECTED DRAWING: Figure 1
Inventors:
Izumi Yamamoto
Application Number:
JP2016121958A
Publication Date:
April 08, 2020
Filing Date:
June 20, 2016
Export Citation:
Assignee:
CITIZEN WATCH CO.,LTD.
International Classes:
H01G7/02; H02N1/00
Domestic Patent References:
| JP2013150387A | ||||
| JP2014050196A | ||||
| JP2014107890A | ||||
| JP2016070846A |
Foreign References:
| WO2015019919A1 |
Attorney, Agent or Firm:
Atsushi Aoki
Jun Tsuruta
Tomohiro Minamiyama
Koichi Itsubo
Ryoichi Hagiwara
Jun Tsuruta
Tomohiro Minamiyama
Koichi Itsubo
Ryoichi Hagiwara