To obtain an evaporation source which has superior heat responsibility on heating and cooling, gives no molecular damage to vaporizing materials 2, and hence is most suitable for a manufacturing process of an organic electroluminescent element by means of laminating films of organic polymer materials, through sequentially evaporating the several vaporizing materials 2 and depositing them on a substrate 17.

The electron beam bombardment type evaporation source has a crucible 1 which accommodates an vaporizing material 2, and a heating means for heating and evaporating the vaporizing material 2 in the crucible 1. The evaporation source comprises making the crucible 1 from a refractory metal such as molybdenum and tantalum, a filament 5 which generates thermoelectrons by a heating means, and a power source 22 for accelerating the thermoelectrons generated at the filament 5 and bombarding them to the above crucible 1.