Title:
電子線検出器、走査型電子顕微鏡、質量分析装置、及び、イオン検出器
Document Type and Number:
Japanese Patent JP4246995
Kind Code:
B2
Abstract:
In an electron beam detector, a light guide optically couples a fluorescence emitting surface of the compound semiconductor substrate to a light incident surface of the photodetector, and physically connects the compound semiconductor substrate with the photodetector, thereby integrating the compound semiconductor substrate with the photodetector. When the compound semiconductor substrate converts incident electrons to fluorescent light, the light guide guides the fluorescent light to the photodetector, and the photodetector detects the fluorescent light, thereby detecting the incident electrons.
Inventors:
Minoru Kondo
Nagai Toshimitsu
Jun Kizuna
Nagai Toshimitsu
Jun Kizuna
Application Number:
JP2002561972A
Publication Date:
April 02, 2009
Filing Date:
January 30, 2002
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
G01T1/20; G01N27/62; G01N27/64; G01T1/202; H01J29/38; H01J37/244; H01J43/04; H01J43/28; H01J49/00; H01J49/06; G01N23/225
Domestic Patent References:
| JP54018269A | ||||
| JP2000008035A | ||||
| JP11339681A | ||||
| JP2000249768A |
Attorney, Agent or Firm:
Kazuhiro Kitazawa
Shin Koizumi
Akiko Ichikawa
Shin Koizumi
Akiko Ichikawa
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