Title:
ELECTRON BEAM DETECTOR
Document Type and Number:
Japanese Patent JPS5361281
Kind Code:
A
Abstract:
PURPOSE:To accurately perform checking of electron beam positions within a short time by disposing a semiconductor active element having a mark to absorb electron beams in adjacent to the specimen to be scanned by electron beam and scanning up to said element surface with a deflector thereby knowing the difference of signal intensities owing to the presence of the mark with the amplifier connected to the element.
Inventors:
GOTOU NOBUO
Application Number:
JP13699576A
Publication Date:
June 01, 1978
Filing Date:
November 15, 1976
Export Citation:
Assignee:
NIPPON ELECTRON OPTICS LAB
International Classes:
G01T1/24; G03F7/20; H01J37/244; H01J37/28; H01J37/304; H01L21/027; (IPC1-7): G01T1/24; G03F7/20; H01J37/29; H01L21/30; H05K3/06
Other References:
THE BELL SYSTEM TECHNICAL JOURNAL=1970