Title:
ELECTRON BEAM IRRADIATION DEVICE
Document Type and Number:
Japanese Patent JPH1144800
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To improve the reliability of an electron beam irradiation device. SOLUTION: This electron beam irradiation device is provided with a vacuum barrel 13 closed at the base end section and opened at the tip section, a window member 14 closing the tip section of the vacuum barrel 13, a differential exhaust barrel 15 fitted to the window member 14, a differential exhaust barrel window member 16 closing the tip section of the differential exhaust barrel 15, a horn 2 fitted to the differential exhaust barrel window member 16, a cathode 3 arranged in the vacuum barrel 13, an anode 4 arranged in the vacuum barrel 13, a magnet 6 arranged on the outer peripheral section of the differential exhaust barrel 15, a vacuum pump 8 connected to the vacuum barrel 13, and a differential exhaust vacuum pump 17 connected to the differential exhaust barrel 15. When the airtightness of the window member 16 is lowered, the inflow of the atmospheric air into the vacuum barrel 13 is suppressed by the window member 14. When the airtightness of both window members 14, 16 is lowered, most of the atmospheric air flowing into the differential exhaust barrel 15 is sucked by the differential exhaust vacuum pump 17, and a burnout of the cathode 3 is prevented.
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Inventors:
KANEKO NAMIO
Application Number:
JP20310497A
Publication Date:
February 16, 1999
Filing Date:
July 29, 1997
Export Citation:
Assignee:
ISHIKAWAJIMA HARIMA HEAVY IND
International Classes:
G21K5/04; H01J33/00; (IPC1-7): G21K5/04; H01J33/00
Attorney, Agent or Firm:
Tsunemitsu Yamada (1 person outside)